JPH0243089Y2 - - Google Patents

Info

Publication number
JPH0243089Y2
JPH0243089Y2 JP1982162778U JP16277882U JPH0243089Y2 JP H0243089 Y2 JPH0243089 Y2 JP H0243089Y2 JP 1982162778 U JP1982162778 U JP 1982162778U JP 16277882 U JP16277882 U JP 16277882U JP H0243089 Y2 JPH0243089 Y2 JP H0243089Y2
Authority
JP
Japan
Prior art keywords
scanning
electron beam
angle
aperture
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982162778U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5966853U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16277882U priority Critical patent/JPS5966853U/ja
Publication of JPS5966853U publication Critical patent/JPS5966853U/ja
Application granted granted Critical
Publication of JPH0243089Y2 publication Critical patent/JPH0243089Y2/ja
Granted legal-status Critical Current

Links

JP16277882U 1982-10-26 1982-10-26 面積走査角度走査両用電子線走査型分析装置 Granted JPS5966853U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16277882U JPS5966853U (ja) 1982-10-26 1982-10-26 面積走査角度走査両用電子線走査型分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16277882U JPS5966853U (ja) 1982-10-26 1982-10-26 面積走査角度走査両用電子線走査型分析装置

Publications (2)

Publication Number Publication Date
JPS5966853U JPS5966853U (ja) 1984-05-04
JPH0243089Y2 true JPH0243089Y2 (en]) 1990-11-16

Family

ID=30357355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16277882U Granted JPS5966853U (ja) 1982-10-26 1982-10-26 面積走査角度走査両用電子線走査型分析装置

Country Status (1)

Country Link
JP (1) JPS5966853U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754677B2 (ja) * 1987-10-16 1995-06-07 日本電子株式会社 Ｘ線分析電子顕微鏡

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481063A (en) * 1977-12-12 1979-06-28 Jeol Ltd Electron-beam equipment

Also Published As

Publication number Publication date
JPS5966853U (ja) 1984-05-04

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